On the carbon and tungsten sputtering rate in a magnetron discharge

Magnetron discharge as sputtering source can serve as an alternative tool for the study of the plasma-wall interaction, with applications for ITER divertor. The present work reports on the influence of the target power density and the nature of the projectile on the erosion of C and W targets. The experimental results concern the sputtering rate of carbon and tungsten targets of a d.c. magnetron discharge in argon and helium atmosphere, at different gas pressures in the range of 10–100 mTorr and discharge power densities up to 40 W cm−2 while the discharge current intensity was used as control parameter. In this investigation, carbon and tungsten sputtering rates were measured using two conventional methods based on gravimetric mass loss and profilometry. Target erosion profiles were compared with the profiles of the ion energy flux bombarding the target, calculated from a 2D fluid model.