Diagnostics and active species formation in an atmospheric pressure helium sterilization plasma source

Systematic spectroscopic studies and diagnostics of an atmospheric pressure radiofrequency (13.56 MHz) He plasma is presented. The discharge is an intrinsic part of the resonant circuit of the radiofrequency oscillator and was obtained using a monoelectrode type torch, at various gas flow-rates (0.1–6.0 l/min) and power levels (0–2 W). As function of He flow-rate and power the discharge has three developing stages: point-like plasma, spherical plasma and ellipsoidal plasma. The emission spectra of the plasma were recorded and investigated as function of developing stages, flow-rates and plasma power. The most important atomic and molecular components were identified and their evolution was studied as function of He flow-rate and plasma power towards understanding basic mechanisms occurring in this type of plasma. The characteristic temperatures (vibrational Tvibr, rotational Trot and excitation Texc) and the electron number density (ne) were determined.