Characterization and applications of a new tabletop confocal micro X-ray fluorescence setup

A tabletop confocal three-dimensional micro X-ray fluorescence (3D micro-XRF) setup was designed, based on polycapillary X-ray optics and a micro-focus X-ray source. This confocal setup consists of a polycapillary full lens to focus the incident beam and a polycapillary half lens to collect the X-ray fluorescence. The confocal volume was proved to be ellipsoidal. The full-width at half maximum (FWHM) of the confocal volume in three directions were measured with a “knife edge” scan method to obtain the spatial resolution of the confocal setup. The structure of multilayer samples was studied using the depth scan technique.