Interpolation formula for particle reflection coefficient of keV light ions obliquely incident on heavy solids

The particle reflection coefficient of light keV ions backscattered from heavy solids as a function of the ion incidence angle has been determined by a suitable interpolation formula. The formula has two fitting parameters which are obtained by using results from two limiting analytic approaches: by the single collision model – in case of nearly perpendicular incidence; and by the small-angle multiple scattering theory – in case of glancing angles of incidence. The obtained interpolation formula is a universal function of the scaled transport cross section and the angle of incidence. Comparison of our calculations with Monte Carlo simulation data and the experimental results of other authors gives good agreement for particle reflection coefficient.