Toward high accuracy in channeling Rutherford backscattering spectrometry analysis

Channeling Rutherford backscattering spectrometry (RBS) has been widely used to quantitatively analyze displacements in monocrystalline solid state thin films. Its accuracy, however, relies on the approach of separating yields contributed by channeled components and by dechanneled components. In this study, efforts have been made to increase accuracy through three major approaches: first, we have considered the stopping power difference between channeled and non-channeled components; second, we have proposed a mathematical formula to describe a smooth transition from single scattering to multiple scattering in describing dechanneling of analyzing beams as a function of displacements; third, we have used an iterative approach to extract yields from dechanneling components without using any predetermined dechanneling cross sections. These novel approaches are expected to increase accuracy in channeling RBS analysis.