Application of confocal technology based on polycapillary X-ray optics in three-dimensional diffraction scanning analysis

The confocal technology based on a polycapillary focusing X-ray lens in the excitation channel and a polycapillary parallel X-ray lens in the detection channel was used to perform three-dimensional energy dispersive X-ray diffraction scanning analysis of a copper film on a silicon substrate. A theoretical model of correcting the intensity of the diffracted X-rays from different parts of the sample in the confocal volume was designed. The point-to-point 3D diffraction information of the sample was obtained.