کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1683730 1518751 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Investigation of InAs/GaSb-based superlattices by diffraction methods
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Investigation of InAs/GaSb-based superlattices by diffraction methods
چکیده انگلیسی

We use high-resolution X-ray diffraction and high-resolution transmission electron microscopy in order to study the strain state, atomic intermixing and layer thicknesses in the MBE-grown GaSb/InSb/InAs/InSb superlattices. Simple and fast metrology procedure is developed, which allows us to obtain the most important technological parameters, such as the thicknesses of the GaSb, InAs and ultra-thin InSb sub-layers, the superlattice period and the fraction of atomic substitutions in the InSb sub-layers.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 268, Issues 3–4, February 2010, Pages 231–235
نویسندگان
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