کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1683783 | 1518703 | 2013 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Diamond-like carbon sputtering by laser produced Xe plasma Diamond-like carbon sputtering by laser produced Xe plasma](/preview/png/1683783.png)
The sputtering of diamond-like carbon (DLC) was investigated using Xe ion bombardment from the laser plasma X-ray source (LPX). The LPX we developed uses a solid Xe target and emits UV–X-rays and Xe ions. Using the LPX as an ion source, we measured etching depths of DLC, Ru, and Au films using a quartz crystal microbalance (QCM) to determine their ion sputtering rates at incident angles of 0° and 70°. The calculated results by the SRIM code were able to predict the measured results, except for the case of the DLC film at 0° incident. Our measured result indicated that the DLC sputtering at 0° was ten times larger than previously reported data, in which an ion gun was used. We consider that the difference was a characteristic effect of the laser plasma, and can be explained as a synergistic effect of ion bombardment and UV radiation from the Xe plasma.
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 314, 1 November 2013, Pages 26–29