Kinetic excitation of solids induced by energetic particle bombardment: Influence of impact angle

The kinetic excitation of a solid surface under bombardment with energetic particles is studied via internal electron emission in a metal-insulator-metal junction. In particular, the dependence of the measured tunneling yield on the projectile impact angle is studied. The resulting impact angle distribution is compared with predictions of the total excitation energy profile calculated using the SRIM 2006 Monte Carlo program package. While the calculated profiles fail to explain the experimental data, it is shown that a simple calculation of impact angle dependent projectile backscattering qualitatively reproduces the observed trends.