Energy and depth resolution in elastic recoil coincidence spectrometry

Elastic recoil coincidence spectrometry was implemented into the analytical ion beam simulation program DEPTH. In the calculations, effective detector geometry and multiple scattering effects are considered. Mott’s cross section for the identical, spin zero particles is included. Spectra based on the individual detector signal and summing the energy of the recoiled and scattered particles originating from the same scattering events can also be calculated. To calculate this latter case, the dependency of the energy spread contributions had to be reconsidered.