The new Heavy Ion ERDA set up at iThemba LABS Gauteng: Multilayer thin film depth profiling using direct calculation and Monte Carlo simulation codes

► A new Heavy Ion ERDA set up has been constructed at iThemba LABS Gauteng. ► A bi-layer Al2O3/Ti film stack was prepared by electron beam evaporation, annealed and analysed using the new set up. ► Direct calculation and Monte Carlo simulation codes were used to extract depth profiles. ► Interfacial reactions at 800 °C suggest a case of the Kirkendall effect.