Plasma implantation using high-energy ions and short high voltage pulses

The main objective of this paper is to describe the use of a high voltage pulser based on Blumlein technology for surface treatment by plasma immersion implantation. In particular, we will consider its potential application for nitriding polymer and Al surfaces. The Blumlein technique consists basically of charging several coaxial transmission in parallel and discharging them in series into a matched load by means of the closure of a thyratron switch at the generator input side.