کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1684666 | 1518759 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Scanning X-ray microfluorescence in a SEM for the analysis of very thin overlayers
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
In this paper, we used back-foil scanning X-ray microfluorescence (SXRF) and we examined the sensitivity of the technique for the analysis of very thin overlayers, where electron probe X-ray microanalysis (EPMA) reaches its detection limits. The lateral resolution of back-foil SXRF is also calculated for all the systems used. Both experimental results and Monte-Carlo calculations are used in this respect. Back-foil SXRF used in optimized experimental conditions, is found to be more sensitive than EPMA, especially in the case of very thin overlayers. The lateral resolution of back-foil SXRF is of the order of some micrometers. This is much better than the lateral resolution in conventional XRF and of the same order of magnitude as in EPMA.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 260, Issue 2, July 2007, Pages 628–632
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 260, Issue 2, July 2007, Pages 628–632
نویسندگان
E.S. Valamontes, J.C. Statharas, C. Nomicos,