کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1684707 1518724 2012 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Study of interaction of C+ ion beam with a Si pitch grating on a macro-scale level
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Study of interaction of C+ ion beam with a Si pitch grating on a macro-scale level
چکیده انگلیسی
A Si pitch grating has been exposed to a 6 keV C+ ion beam at normal angle of incidence and at an angle of 42° parallel to the structure. Sputtering of the grating has been observed experimentally by Rutherford backscattering, the areal density of implanted C ions into the Si structure has been measured by nuclear reaction analysis. The bombardment has been simulated by the SDTrimSP-2D code at normal angle of incidence, as well as at angles of 42° parallel and perpendicular to the structure. The numerical simulations show reasonable agreement with experimental results. Significant differences in Si sputtering and implantation of C ions parallel and perpendicular to the structure indicate an anisotropy effect, which could not be observed in the 1D case.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 293, 15 December 2012, Pages 11-15
نویسندگان
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