Modification of embedded Cu nanoparticles: Ion irradiation at room temperature

Cu nanoparticles (NPs) with an average diameter of ∼25 Å were synthesized in SiO2 by ion implantation and thermal annealing. Subsequently, the NPs were exposed to ion irradiation at room temperature simultaneously with a bulk Cu reference film. The ion species/energy was varied to achieve different values for the nuclear energy loss. The short-range atomic structure and average NP diameter were measured by means of extended X-ray absorption fine structure spectroscopy and small angle X-ray scattering, respectively. Transmission electron microscopy yielded complementary results. The short-range order of the Cu films remained unchanged consistent with the high regeneration rate of bulk elemental metals. For the NP samples it was found that increasing nuclear energy loss yielded gradual dissolution of NPs. Furthermore, an increased structural disorder was observed for the residual NPs.