Mechanical and corrosive behavior of Ti/TiN multilayer films with different modulation periods

Ti/TiN multilayer films with different periods Λ (Λ = λTiN + λTi) were synthesized on 17-4PH stainless steel and silicon wafer using unbalanced magnetron sputtering. The microstructure of the films was characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The mechanical properties such as hardness, sliding wear behavior and adhesion were analyzed by means of micro-hardness, ball-on-disc and scratch tests. The anodic polarization characteristics were measured in a 3% NaCl solution at room temperature to examine the corrosion resistance. Moreover, the corrosion resistance in a 350 °C water vapor ambience also was analyzed. XRD revealed a gradual TiNx transition layer between Ti and TiN. The SEM results confirmed the periodicity of the Ti/TiN multilayer films. The hardness and wear resistance of the Ti/TiN multilayer films increased with decrease of the modulation period. The adhesion strength between Ti/TiN multilayer films and 17-4PH substrate was improved with proper modulation period. The Ti/TiN multilayer films can for a corrosion protective coating on 17-4PH stainless steel in 3% NaCl solution, however the corrosion resistance at 350 °C vapor ambience decreased for the period Λ below 200 nm.