کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1684827 1010539 2008 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Modification of DLC films by Ni+ ions implantation
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Modification of DLC films by Ni+ ions implantation
چکیده انگلیسی
Enhanced diamond-like carbon (DLC) multilayer films were produced by a method of alternating the magnetic filtered vacuum cathode arc deposition and the metal vapor vacuum arc (MEVVA) implantation of Ni+ ions. The microstructure and mechanical properties of these multilayer films were studied by XPS, Raman, SEM, AFM, XRD, nano-intender and internal stress measurement. The results reveal that with the increasing dose of implanted Ni+ ions, the sp3 contents are declining and reduction of the nanohardness and release of the internal stress are observed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 266, Issue 18, September 2008, Pages 3939-3944
نویسندگان
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