کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1684901 1010540 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Sputtering induced by cluster impact on metal targets: Influenceof electronic stopping
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Sputtering induced by cluster impact on metal targets: Influenceof electronic stopping
چکیده انگلیسی

The effect of electronic stopping on the sputtering of metals by cluster impact is discussed. We focus on the specific case of Au13 impact on a Au surface. Using molecular-dynamics simulation, we study several strategies to include electronic stopping. Electronic stopping influences both the magnitude of the sputter yield and the duration of the sputter process. In the usual procedure, electronic stopping only affects sufficiently fast atoms with kinetic energies above a threshold energy, which is of the order of the target cohesive energy. When assuming that electronic stopping holds down to thermal energies <1 eV, or even to 0 eV, the collision spike is rapidly quenched and the sputter yields become unrealistically small. Furthermore, we implement a scheme to include electronic stopping based on local (electron) density information readily available in a simulation.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 267, Issue 16, 15 August 2009, Pages 2765–2768
نویسندگان
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