کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1684934 1010541 2007 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
An analytical energy-loss line shape for high depth resolution in ion-beam analysis
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
An analytical energy-loss line shape for high depth resolution in ion-beam analysis
چکیده انگلیسی

The knowledge of the energy-loss distribution in a single ion-atom collision is a prerequisite for subnanometric resolution in depth-profiling techniques such as nuclear-reaction profiling (NRP) and medium energy ion-scattering (MEIS). The usual Gaussian approximation specified by the stopping power and energy straggling is not valid for near surface regions of solids, where subnanometric or monolayer resolution can be achieved. In this work we propose an analytical formula for the line shape to replace the usual Gaussian distribution widely used in low-resolution ion-beam analysis. Furthermore, we provide a simple physical method to derive the corresponding shape parameters. We also present a comparison with full coupled-channel calculations as well as with experimental data at nearly single collision conditions.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 256, Issue 1, March 2007, Pages 92–96
نویسندگان
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