کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1685016 1518729 2012 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Focused ion beam assisted deposition of nanostructures at elevated substrate temperatures
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Focused ion beam assisted deposition of nanostructures at elevated substrate temperatures
چکیده انگلیسی
Nanostructures of Pt, W and C have been fabricated on Si substrate by ion induced cracking of the appropriate precursor gas molecules employing Ga ions at constant beam parameters and increasing substrate temperatures. The nanopillars exhibit variation in the physical, morphological and compositional properties as a function of substrate temperature at constant ion beam parameters. These results have been tried to understand on the basis of temperature dependent sticking tendency of the gas molecules to the substrate, thermal desorption process of the adsorbed precursor gas molecules, it's interaction with the Ga ions, etc.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 288, 1 October 2012, Pages 6-9
نویسندگان
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