کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1685338 | 1518737 | 2012 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Significant stress reduction of cBN layers upon ion irradiation at elevated temperatures
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
Superhard cubic boron nitride (cBN) thin films can be synthesized nowadays by a variety of PVD and PECVD techniques. Their applications are however still impeded by extremely high film stresses, typically above 20Â GPa, resulting from a severe ion bombardment of the growing surface being obligatory for the formation of the cubic phase. This stress was shown to be partly released by an addition of oxygen during film deposition, with deposited films containing approx. 5Â at.% of oxygen embedded into the cubic lattice. In this study, further impacts on the stress of such oxygen-incorporated cBN films (cBN:O) are studied by means of post-deposition high-energy implantation of oxygen-, neon-, and krypton-ions, respectively. It is shown, in particular, that the irradiation by krypton ions at 600Â K temperature can produce a significant stress reduction of cBN:O from 10Â GPa down to 4Â GPa, without inducing observable transformation of existing cubic structure into the hexagonal phase.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 280, 1 June 2012, Pages 18-21
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 280, 1 June 2012, Pages 18-21
نویسندگان
S. Weidner, J. Ye, S. Geburt, C. Ronning, S. Ulrich,