کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1685673 | 1518758 | 2007 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Absolute calibration of a 1.5Â m grazing incidence monochromator for extreme ultraviolet (EUV) diagnostics of a plasma source
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Absolute calibration of a 1.5Â m grazing incidence monochromator for extreme ultraviolet (EUV) diagnostics of a plasma source Absolute calibration of a 1.5Â m grazing incidence monochromator for extreme ultraviolet (EUV) diagnostics of a plasma source](/preview/png/1685673.png)
چکیده انگلیسی
We have calibrated a 1.5 m grazing incidence monochromator with the light of known wavelength at the advanced light source (ALS) of the Lawrence Berkeley National Laboratory (LBNL) using beamline 6.3.2. Several measurements in the 13-30 nm wavelength range with well resolved monochromatic light were examined at ALS. Such precise measurements have enabled us to find the dependence of the efficiency as function of wavelengths for the EUV monochromator in the wavelength range of 10-80 nm using previously and current determined sensitivities. We have used this calibrated monochromator for EUV diagnostics of a plasma source developed at LBNL. In particular, we have normalized previously measured EUV radiative lines arising from xenon (Xe) ions originating from charge state q = 1-10 in the wavelength range of 10-16 nm with special attention for the wavelength of 13.4 nm which might have lithographic applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 261, Issues 1â2, August 2007, Pages 166-169
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 261, Issues 1â2, August 2007, Pages 166-169
نویسندگان
R. Bista, H. Merabet, R. Bruch, S. Fülling,