کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1685963 | 1010583 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
MD simulation of sputtering on surface index and surface roughness dependence
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
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چکیده انگلیسی
Low-energy sputtering is studied through molecular dynamics (MD) and binary-collision approximation (BCA) simulations. First, MD simulations as a preliminary study are performed for 5 keV Ar impacts on a Cu target. When random numbers gave the direction of the target crystal axis for each impact, the total sputtering yield almost agreed with the experimental yield of a polycrystalline Cu target. Second, we performed MD and BCA simulations for self-sputtering of W with an incident energy of 100 eV and incident angles of 0°–85°. We found that the many-body collision results in high-yield sputtering at grazing incidence. The incident angle dependence of sputtering yields fade out for an MD result with a rough surface.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 255, Issue 1, February 2007, Pages 214–218
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 255, Issue 1, February 2007, Pages 214–218
نویسندگان
T. Muramoto, T. Kenmotsu,