Cross-section for 14N(α, p0)17O reaction in the energy range 3.2-4.0 MeV

The cross-section for the 14N(α, p0)17O nuclear reaction was measured in the beam energy range between 3.2 and 4.0 MeV, at a laboratory scattering angle of 135° using a thin TiN film (95 nm) deposited on Si substrate. The accurate stoichiometry as well as the thickness of the TiN film and other potential impurities were characterized by ERD-TOF with a 40 MeV Cu8+ beam and RBS with an 800 keV He+ beam. The cross-section was evaluated at maximum intervals of 15 keV, with smaller intervals of less than 10 keV in the neighborhood of the resonance, from the simultaneously measured nuclear reaction spectra and Rutherford backscattering spectra. The total uncertainty of the cross-section is estimated to be less than 7%. As an application, the evaluated cross-section was used to simulate the NRA spectra obtained from a GaAs1−xNx sample with different beam energies. The nitrogen concentration results are in good agreement with the secondary ion mass spectrometry measurements.