کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1686498 | 1518763 | 2006 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Development of three-dimensional medium-energy ion scattering using a large solid angle detector
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
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چکیده انگلیسی
Three-dimensional medium-energy ion scattering (3D-MEIS) equipped with a large detector has been developed for crystallographic structural and elemental analysis of materials. Backscattering experiments have been made for a Si(0 0 1) sample at the geometry that the range of the scattering angle is as large as ±17.5°. Clear blocking shadows were observed together with belt-like shadow aggregations. A low yield spot not relevant to a blocking cone appears, but it can be excluded from the blocking pattern by changing the detection geometry. The results indicate that 3D-MEIS using a large solid angle detector is promising for crystallographic material analysis.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 249, Issues 1–2, August 2006, Pages 266–269
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 249, Issues 1–2, August 2006, Pages 266–269
نویسندگان
Takane Kobayashi,