An energy dispersive micro X-ray diffractometer based on a combined system of polycapillary optics

An energy dispersive micro X-ray diffractometer based on a combined system of two polycapillary X-ray lenses is designed. The polycapillary X-ray lens in the excitation channel is either a polycapillary parallel X-ray lens (PPXRL) or a slightly focusing polycapillary X-ray lens (SFPXRL). The polycapillary X-ray lens in the detection channel is a PPXRL. At 6.4 keV and 2θ = 141.5°, the total resolution of the diffractometer based on a SFPXRL in the excitation channel and a PPXRL in the detection channel in Δd/d is 4.8%.