Self-organized nanodot formation on InP(1Â 0Â 0) by oxygen ion sputtering

We demonstrate the formation of ordered nanodot chains with dot size less than 100 nm by 1 keV O2+ beam sputtering on InP(1 0 0). The ordered nanodot chains are perpendicularly aligned to the ion beam direction, and are formed at 38° and 44° incidence with ion current density of 100 μA cm−2. At 56° and 62° incidence, the nanodot chains formed are shorter and more coarse, and the periodicity of the nanodot chains is suppressed. XPS analysis show that the surface of nanodots formed comprise In2O3 and various InP oxides; and is In2O3-rich due to the preferential sputtering of P atoms.