A new method of depth sensitive micro-X-ray fluorescence analysis

A new method to measure depth distributions of elements by micro-X-ray fluorescence analysis was developed. This method is based on the use of a focusing optical element and the knife-edge principle and gives depth resolutions of about 23 μm. Furthermore, this method also allows measuring surface profiles with a depth resolution of 7 μm. In this paper experimental results of depth distribution measurements of a layered sample and of the surface roughness profile of another sample are presented.