کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1687037 1010637 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Film growth by polyatomic C2H5+ bombarding a diamond (1 0 0) surfaces: Molecular dynamics study
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Film growth by polyatomic C2H5+ bombarding a diamond (1 0 0) surfaces: Molecular dynamics study
چکیده انگلیسی

The deposition of polyatomic C2H5+ ions is studied using classical molecular dynamics simulations with a new improved Brenner potentials developed by Brenner. The simulation results show that when the incident energy is less than 65 eV, the deposition coefficient of H is larger than that of C atoms. When the incident energy is larger than 65 eV, the deposition of H is less than that of C atoms. With increasing incident energy, a transition from Csp3-rich to Csp2-rich in the grown films is found.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 267, Issue 18, 15 September 2009, Pages 3238–3241
نویسندگان
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