Determination of plasma parameters in rf glow-discharge plasma

The Langmuir probe measurements were carried out in a planar rf discharge of N2 and Ar gases. The dc characteristic I-U curves are calculated from the measured rf characteristic I-U curves for frequencies 10-60 MHz. The measured parameters such as electron temperature and electron density are compared with the simulated results. At gas pressures 10-40 Pa, the sheath thickness at the powered electrode was proportional to f−0.5 for simulation and f−2/3 by using the electrical parameters of the probe measurements and to p−0.5 for both cases.