کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1687224 | 1518754 | 2009 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Influence of the beam current density distribution on the spatial resolution of a nuclear microprobe
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Influence of the beam current density distribution on the spatial resolution of a nuclear microprobe Influence of the beam current density distribution on the spatial resolution of a nuclear microprobe](/preview/png/1687224.png)
چکیده انگلیسی
The paper discusses the effect of nonuniform distribution of the ion beam phase density on the nuclear microprobe resolution. The deconvolution of the beam brightness distribution parameters was performed on the base of the beam current distribution measurements in the object collimator plane. This information gives a possibility to define the ion distribution in the phase set for a beam to be transformed by the probe-forming system into the target plane. A criterion for selecting the optimum collimator dimensions was the highest beam current for the fixed beam spot size (FWHM). This approach, with allowance for the initial distribution, makes it possible to obtain a higher beam current intensity at the center of the spot.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 267, Issues 12–13, 15 June 2009, Pages 2041–2045
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 267, Issues 12–13, 15 June 2009, Pages 2041–2045
نویسندگان
A.A. Ponomarov, V.I. Miroshnichenko, A.G. Ponomarev,