Applications of microstructures fabricated by proton beam writing to electric-micro filters

Fabrication of high-aspect-ratio microstructures was performed by proton beam writing (PBW) using a microbeam line at Takasaki Ion Accelerators for Advanced Radiation Application (TIARA), JAEA Takasaki, JAPAN. As one of the applications of the high-aspect-ratio structures micro-machined by PBW, we utilized the high-aspect pillars for electric-micro filters of microbes such as Escherichia coli and Yeast based on the dielectrophoretic force. The filter is equipped with high-aspect pillars with a height of ∼20 μm and a diameter of ∼1 μm on a glass plate. Evaluation of the dielectrophoresis (DEP) device for capturing E. coli and Yeast was made using either observation by optical microscope or photoluminescence (PL) measurements.