Development of elastomeric lab-on-a-chip devices through Proton Beam Writing (PBW) based fabrication strategies

In recent years, one of the most exciting developments in fluidic device applications is the rapid evolution of miniaturized micro- and nanofluidic systems, the so called “lab-on-a-chip” devices. These devices integrate laboratory functions into a single chip, and are capable of various biochemical analysis and synthesis, such as sample injection and preparation, single cell/molecule observation, bioparticle sequencing and sorting etc. The evolvement of lab-on-a-chip concept implies the use of novel fabrication techniques for the construction of versatile analytical components in a fast and reproducible manner. Endowed with unique three-dimensional fabrication abilities, Proton Beam Writing (PBW) [1], which is capable of producing nanometer scaled fluidic structures with smooth and straight side wall features, has a great potential to develop all sorts of polymer fluidic devices.In this paper, we describe the batch fabrication of Poly-dimethysiloxane (PDMS) elastomeric lab-on-a-chip devices utilizing PBW technique. A series of fabrication processes, involving PBW, nickel electroplating, soft lithography, polymer dynamic coating and hydrophilic treating, were modified and adopted in our work. Subsequent characterization of individual categories of channel devices was carried out for specific fluidic studies. Respective experimental procedures are presented and results are explained. The channel devices demonstrated good fluidic performance and functionality, suggesting their further application in more complex biological investigations, and the versatility of PBW in lab-on-a-chip development.