Development of time-of-flight RBS system using multi microchannel plates

A new time-of-flight Rutherford backscattering spectroscopy (TOF-RBS) system with two circular microchannel plates (MCPs) installed at a distance of 140 mm from a sample holder and a scattering angle of 125° and a 100 kV focused ion beam column having a liquid metal ion source (LMIS) of AuSiBe alloy has been assembled to obtain high counting rate and enhanced mass resolution. The possible influence of the two MCPs by logical summation of the output signals on the time resolution was investigated by measuring dedicated thin deposited metallic samples. And, the time resolution was found in the range of 1.5–2 ns.