کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1687793 | 1010682 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Proton beam micromachined buried microchannels in negative tone resist materials
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
In the present work the Atomki, Debrecen microprobe facility has been used to write long tilted structures by 2 MeV protons. For the formation of the structures, two exposures have been carried out at +20° and −20° using a goniometer stage sample holder. The tilted structures were resolved in the negative tone resist materials SU-8 and ADEPR (an aqueous base developable chemically amplified resist). The length of the microchannels was varied between 100 μm and 1000 μm, the wall thickness was less than 10 μm. By applying the developed methodology it was possible to resolve the desired layout through the whole length of the channel.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 260, Issue 1, July 2007, Pages 414–418
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 260, Issue 1, July 2007, Pages 414–418
نویسندگان
I. Rajta, M. Chatzichristidi, E. Baradács, C. Cserháti, I. Raptis, K. Manoli, E.S. Valamontes,