On the surface sensitivity of angular scans in LEIS

A Cu(1 0 0) surface has been investigated by means of time-of-flight low-energy ion scattering using 4He+ ions. Polar and azimuth scans have been performed. The evaluation of the obtained spectra demonstrates the influence of background contributions to the overall yield. Selection of single scattering processes was achieved by background subtraction. This allows for high surface sensitivity even for neutral scattering spectra.