کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1687919 | 1518761 | 2006 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Physical insight into ultra-shallow junction formation through atomistic modeling
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
We use atomistic simulations to gain physical understanding of relevant dopant–defect interactions involved in junction formation. The analysis of the energetics of B–Si interstitial clusters (BICs) indicates that a high Si interstitial supersaturation is necessary to nucleate BICs in crystalline Si, but only a Si interstitial supersaturation slightly larger than that set by BICs is enough to cause the stabilization and growth of preexisting BICs. We have analyzed the mechanisms associated to B uphill diffusion and deactivation in preamorphized Si upon subsequent annealing. Both phenomena occur simultaneously and they are the result of the trapping of B atoms by preexisting B clusters in the high concentration region.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 253, Issues 1–2, December 2006, Pages 41–45
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 253, Issues 1–2, December 2006, Pages 41–45
نویسندگان
L. Pelaz, M. Aboy, P. Lopez, L.A. Marques, I. Santos,