3 keV Ar scattering from unreconstructed Si(1 0 0) at grazing incidence: Molecular dynamics simulation

In this paper, grazing scattering of 3 keV Ar along the [1 0 0] direction of an ideal (unreconstructed) Si(1 0 0) surface is simulated using the molecular dynamics (MD) method. A detailed analysis of the scattering trajectories is performed. The scattering process in many cases involves a sequence of simultaneous collisions between projectile and target atoms. The scattered intensity is presented as a function of the polar scattering angle, the azimuthal scattering angle and the energy loss. Various prominent features of the spectra are assigned to specific scattering trajectories.