کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1688353 1518966 2014 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
The Child-Langmuir collision laws for the cathode sheath of glow discharge in nitrogen
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
The Child-Langmuir collision laws for the cathode sheath of glow discharge in nitrogen
چکیده انگلیسی
This paper reports the measurements of dc cathode sheath thickness d together with the voltage drop U across it at different current I values in nitrogen. For the case of a narrow gap when the discharge consists only of a cathode sheath and a negative glow almost all voltage applied across the electrodes drops across the cathode sheath. We observe that at the nitrogen pressure p < 1 Torr, as well as for p > 1.5 Torr the Child-Langmuir collision law version characterized by the constant ion mobility is valid. Within the pressure range of 1 < p < 1.5 Torr none of Child-Langmuir law versions (with a constant mobility or a constant ion mean free path) are applicable for the description of the dc cathode sheath in nitrogen. The available references enable us to conclude that at p < 1 Torr the discharge is dominated by N+ ions whereas for p > 1.5 Torr N4+ ions dominate. These ions are not prone to charge exchange with N2 molecules and they move in the dc cathode sheath with constant mobility. Within the pressure range of 1 < p < 1.5 Torr the discharge contains N+, N2+, N3+ and N4+ ions in comparable concentrations therefore none of the Child-Langmuir law versions can be valid.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 103, May 2014, Pages 49-56
نویسندگان
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