کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1688628 | 1518973 | 2013 | 7 صفحه PDF | دانلود رایگان |
A simple and compact gas aggregation cluster and nanoparticle source based on a planar magnetron (Haberland type) without mass separation was characterized. Such source produces a beam of neutral, positively and negatively charged particles that are dragged by a buffer gas expanding from the aggregation chamber. Sizes, speeds and charges of nanoparticles have been determined using a combination of TEM micrographs, electrostatic deflection setup and numeric modeling. The strong dependence of the velocity of the nanoparticles on their size was confirmed both experimentally and by modeling.
► The flow of nanoparticles from the gas aggregation cluster source was studied.
► A numerical model of the flow of nanoparticles was developed.
► Experimentally obtained velocities of the nanoparticles were from 30 m/s to >200 m/s.
► The results confirm zero or single positive/negative charge of the nanoparticles.
Journal: Vacuum - Volume 96, October 2013, Pages 32–38