کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1688687 1011184 2012 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Surface loss probability of atomic oxygen
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Surface loss probability of atomic oxygen
چکیده انگلیسی

Measurements of surface loss probabilities of oxygen atoms on Simax glass, PET, Teflon, and Mica at room temperature are presented. The surface loss probability was measured by using a stationary afterglow double pulse discharge technique. The main discharge pulse created oxygen atoms by dissociation of O2 molecules. The second (probe) discharge pulse excited existing atoms in the afterglow. The decay of the density of the oxygen atoms in volume was monitored by discharge induced emission spectroscopy of O lines and Ar actinometric lines. The rate of decay of oxygen atoms was used to determine their surface loss probability. The determined surface loss probabilities are: Simax (3.9 ± 0.65) × 10−3, PET (9.3 ± 1.3) × 10−4, Teflon (6.6 ± 1.3) × 10−4, and Mica (1.2 ± 0.3) × 10−3.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 86, Issue 6, 27 January 2012, Pages 614–619
نویسندگان
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