کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1688731 1011184 2012 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Surface density of growth defects in different PVD hard coatings prepared by sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Surface density of growth defects in different PVD hard coatings prepared by sputtering
چکیده انگلیسی

Growth defects are present in all PVD hard coatings. They have detrimental influence on their tribological properties (higher sticking of workpiece material, higher friction coefficient, worse corrosion resistance, higher gas permeation). In order to improve the tribological properties of PVD hard coatings it is important to minimize the concentration of growth defects. Conventional TiAlN single layer as well as AlTiN/TiN and TiAlN/CrN nanolayer coatings were deposited on cemented carbide, powder metallurgical high speed steel (ASP30) and cold work tool steel (D2) by magnetron sputtering in the CC800/7 and CC800/9 sinOx ML (CemeCon) deposition systems, respectively. The surface morphology of the coated substrates was examined by scanning electron microscope (FE-SEM) in combination with focused ion beam (FIB), and 3D stylus profilometer. By means of 3D-profilometry we performed several measurements and detailed analysis on a series of samples from the several hundred production batches. The influence of growth defects on GDOES (glow-discharge optical emission spectrometry) depth resolution and pitting corrosion was also studied.


► Growth defect density was analysed using 3D profilometry.
► The FIB technique was used to obtain a deep insight into defect structure before and after corrosion.
► The influence of growth defects on GDOES (glow-discharge optical emission spectrometry) depth resolution and pitting corrosion was studied.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 86, Issue 6, 27 January 2012, Pages 794–798
نویسندگان
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