Control of cathodic arc spot motion under external magnetic field

A closed circular transverse magnetic field is designed to control the spot motion of a cathodic arc on a large rectangular target. Stable and controllable spot motion is observed from both graphite and copper. The arc stability, spot velocity, and etched pattern on the cathode surface are studied systematically. Circular tracks are etched on the target surface by the repetitive spot movement and the surface morphology and resistivity of the cathode materials influence the spot velocity.

► This paper realized stable and controllable spot motion on large rectangular target.
► Closed circular trajectories are etched by the repetitive spot motion of spot on both graphite and copper surfaces.
► Spot velocity difference between graphite and copper was explained.