کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1688865 | 1011197 | 2011 | 5 صفحه PDF | دانلود رایگان |
A new range of turbomolecular pumps based on a Compact Metal Spring Damper (CMSD) system is described. The CMSD is essentially a support mechanism for the lower mechanical bearing which takes the form of a three-armed radial leaf spring. The result is that the design allows for small radial movement but has very high axial stiffness. The impact the CMSD has on the design of a new drag stage is described as is the constant very low vibration signature. Pumps fitted with a CMSD achieve such low vibration without the need for high-speed balancing and are fully end-user serviceable.
► A new patented bearing mechanism has been introduced into turbomolecular pumps.
► The Compact Metal Spring Damper is a radial leaf spring for the lower mechanical bearing.
► The CMSD allow for no balancing during manufacture and end-user service.
► The CMSD achieves a very low vibration signature which is kept after bearing change.
► The CMSD allows Siegbahn and regenerative drag stages which give a 20 mbar backing pressure.
Journal: Vacuum - Volume 85, Issue 12, 5 June 2011, Pages 1156–1160