کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1688894 | 1011201 | 2012 | 4 صفحه PDF | دانلود رایگان |
In situ oxygen doping modifies both the morphology and texture of the TiN films. It has been found that beyond 15 at% oxygen doping the columnar morphology is preserved however the <111> texture is changed to the <002>. The detailed structure analysis of the Ti0.45O0.20N0.35 oxynitride films prepared by reactive unbalanced magnetron sputtering (UBMS) in an argon/nitrogen/oxygen mixture atmosphere discovered a substructure in the bulk of the TiN(O) single crystal columns. In the cross sectional transmission electron microscopy (X-TEM) images the substructure is showing up in form of fibre-like morphology parallel to the axis of the columnar crystals and in a honeycomb-like supernetwork in the cross section of the single crystal columns in the plane view TEM specimens. The fibre-like substructure proceeds to the film surface and manifests itself in the morphology of the dome-shaped surface areas of the single crystal columns as revealed by atomic force microscopy analysis.
► Complex analysis of the bulk structure and surface morphology of Ti45O20N35 oxynitride film.
► Fibre-like substructure in the bulk of TiN(O) single crystal columns.
► Surface morphology features correspond both with the fibres and the columnar crystals.
Journal: Vacuum - Volume 86, Issue 12, 20 July 2012, Pages 2105–2108