کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1688963 1011203 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
The influence of operating parameters on pulsed D.C. magnetron sputtering plasma
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
The influence of operating parameters on pulsed D.C. magnetron sputtering plasma
چکیده انگلیسی

This paper describes the breakdown voltage characteristics in a pulsed D.C. magnetron sputtering system under varying conditions of frequency, current and pulse-off time. The behaviour of the breakdown voltage with pulsing frequency at different pressures and constant pulse-off time was recorded and revealed that the breakdown voltage decreased consistently as the frequency increased up to 70 kHz. Above this frequency, perturbation in the breakdown voltage was noted, possibly due to the rise in pre-breakdown current during the few microseconds of pulse-on time. This perturbation effect was no longer observed when the operating current was increased. The breakdown voltage was seen to decrease when the pulse-off time was increased while keeping the total period of the pulse constant.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 85, Issue 5, 9 November 2010, Pages 634–638
نویسندگان
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