Modification of sputter deposited solid-state electrolyte thin films

All solid-state thin film batteries (TFBs) consisting of amorphous lithium phosphorus oxynitride (LiPON) solid electrolyte, crystalline LiMn2O4 cathode and crystalline SnO2 anode have been fabricated and characterized. All of the thin films are prepared by RF magnetron sputtering. By fabricating under different pressures and applying low temperature post-annealing (200 °C), the performances of the LiPON electrolytes and SnO2/LiPON/LiMn2O4 TFBs are improved. Suitable working pressures results in pinhole-free amorphous LiPON films with smooth surface and dense micro-structure. The TFBs post-annealed at 200 °C show smooth interface contacts between electrode and electrolyte thin films. The low pressure deposited and post-annealed TFBs exhibits lower impedance and higher cycling stability. Initial open-circuit voltage of 3.8 V and initial capacity of 12 μAh/cm2 are obtained.