کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1689189 | 1011219 | 2010 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Investigations of the electron-induced ablation in the surface wave plasma
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
High-density plasmas produced by the microwave power coupled in surface wave modes have been studied in order to apply to the material processing. Small targets biased positively beyond a transition voltage are found to emit their materials to the plasma and to form a plume, as seen in Laser ablation, even at the electron current of 2.5Â A with the target voltage as low as 60Â V. Deposition of films, e.g. carbon and metal oxides was performed on substrates exposed near the plume in the plasma. The relevance of the target current density to the plume formation is addressed. Probe measurements of the plasma parameters lead to an interpretation of the condition for the plume to be induced in terms of the particle balance between the net electron current to the target and the theoretical Bohm ion current to the vessel wall.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 84, Issue 12, 25 June 2010, Pages 1407-1410
Journal: Vacuum - Volume 84, Issue 12, 25 June 2010, Pages 1407-1410
نویسندگان
Tatsuya Banno,