Ion implantation effect on atomic structure of deformed Si, Ir, W, Ni and Cu

It has been revealed, that in Ir subjected to severe plastic deformation, an ultrafine grained structure (UFG) is formed (the grain size of 20–30 nm). Practically no defects have been detected within the grains, while, in the case of Ar+ implantation, the subgrain structure with characteristic sizes of about 3–5 nm is formed; defects have been detected within subgrains.The subgrain structure was also revealed in UFG Ni and Cu after severe plastic deformation (SPD) (subgrain size of 3–15 nm), but in the latter case the observed boundary region is broader and subgrain is highly disoriented.