Numerical analysis of ion-implantation in target with a rectangular groove

Ion dynamics of pulsed plasma sheath during the plasma source ion-implantation (PSII) affects the resultant surface properties and structures. In this work, a two-dimensional fluid model is applied to the problem of computing ion dynamics in the sheath of a target with a rectangular groove. The evolution of sheath edge, x and y components of ion velocity on the target surface are simulated to describe the physics of sheath in PSII.